Creation and investigation of nanopositioning systems

Abstract

In the article the mathematical model of the de-veloped nanoscanner is presented. The research results of static and dynamic precision integrating the experimental stand into LFM system are presented, too.Nanoscanner dynamics is expressed mathemati-cally applying the Finite elements method. Theoretical and experimental resonant frequency of nanoscanner table is measured. Precision characteristics with error compensa-tion block and without it are investigated experimentally.The investigation results are to be used in the field of nanolithography in order to enlarge the possibilities of transverse force microscope.